Dry vacuum pumps are dry compressing pumps where no lubricants can get into contact with the pumping media. Thus an absolute hydrocarbon free vacuum is the result.
Leybold Vacuum offers different types of dry compressing vacuum pumps which vary in the principle of operation and are used in different fields of application: diaphragm pumps DIVAC, scroll pumps SCROLLVAC as well as screw type pumps SCREWLINE and DRYVAC.
The dry compressing DIVAC diaphragm pumps were developed for laboratory operations It satisfies the highest expectations in terms of precision, reliability and ease of use. Beside one-stage DIVAC pumps there also are two-stage versions DIVAC L and modular pump systems DIVAC SR, SH and SC available. The DIVAC T-version especially was designed for use as backing pump for (wide range) turbomolecular pumps.
The dry compressing SCROLLVAC SC-D pumps operate on the principle of a scroll compressor. Two or more Archimedes spirals engaging each other. The vacuum is generated by reducing the volume of the pockets and compressing gases from the outside towards the inside thereby pumping the gases. SCROLLVAC pumps operate absolutely oil-free with a high effective pumping speed in the whole range of operation.
New customers’ requirements as well as increased environmental requirements gave rise to the further development of the TRIVAC E. Besides standard voltages and frequencies, Leybold Vacuum offers world motors, which are specially required by OEMs.
SCREWLINE vacuum pumps are dry compressing backing pumps, the operation is based on the screw principle. Besides the integrated oil cooling arrangement for the rotors, the standard versions of the SCREWLINE pumps are air-cooled from the outside. For operation in air conditioned rooms a water-cooled version is offered. The portfolio is completed through ATEX-certified variants. Moreover, the SCREWLINE portfolio also includes pump versions suited for pumping pure oxygen (O2).
The DRYVAC is a new family or dry compressing vacuum pumps. Depending on the application the pumps are available with various equipment components. The DRYVAC series specially is developed for photovoltaic, display and process industry applications. All versions of the DRYVAC family are water cooled, very compact and can simply be mounted to various vacuum systems, so particularly with regard to the well-proven RUVAC WH, WS and WA series.