Leybold Vacuum offers a bride range of different high and ultra high vacuum pumps.
These pumps vary in the principle of operation and field of application: turbo molecular vacuum pumps of the TURBOVAC and MAG series, diffusion vacuum pumps DIP and cryo vacuum pumps of the COOLVAC series. Important items for the selection of the adequate high vacuum pump are: attainable ultimate pressure, required pumping speed, gas throughput or compression.
Oerlikon Leybold Vacuum offers different product lines of Turbo molecular vacuum pumps which vary in the rotor suspension. One of them is the TURBOVAC line with mechanical rotor suspension, another one is the TURBOVAC MAG line with magnetic rotor suspension and finaly the TUBOVAC i Series with hybrid rotor suspension. Each product line contains “classic” turbomolecular pumps as well as turbomolecular pumps with a compound stage, whereby smaller backing pumps can be used.
DIP oil diffusion pumps are high vacuum pumps without any rotating parts.The pumping action of these fluid entrainment pumps in general is based on the transporting capacity of the vapour jet. Compared to other high vacuum pumps the pumping speed of diffusion pumps is extremely high with respect to the in-take area.The operating pressure range varies from 10-2 mbar and 10-7 mbar (0.75•10-2 torr and 0.75•10-7 torr). The pumping speed depending of the pump size from 3000 l/s bis hin zu 50000 l/s. The LEYBOJET pump is equipped with an additional ejector nozzle for obtaining a stable pumping speed into the medium vacuum range.
COOLVAC vacuum pumps are gas entrapment cryo pumps where gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation, cryosorption or cryotrapping. For that purpose the cold surfaces (cryopanels) must be cooled to a sufficiently low temperature. The COOLVAC pumps are cooled by two-stage cold heads of the COOLPOWER series using the Gifford/McMahon principle. COOLVAC pumps produce a hydro carbon free ultra high vacuum in the pressure range from 10-3mbar to 10-11 mbar (0.75•10-3 to 0.75•10-11Torr).